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VACUUM PUMPING SYSTEM
? Low Vacuum Pump:oil Rotary Pump [Mechanical Booster Pump:930m3h-1 Combination Type]
High Vacuum Pump:oil Diffusion Pump 12000l/sce [Option:cryo-pumps OrTurbo Molecular Pumps]

? VACUUM VALVES SYSTEM
Type:3/8",2",4",22"

? CHAMBER HEATING SYSTEM
Max Temperatuer:0 To 400℃
Type:halogen Lamp [Option:micro-sheathe Heater]
Substrate Type:Dome Or Planetary
Rotation Speed:0 To 30rpm
Soft Start Soft Stop And Speed Can Be Changed

? ELECTRON CONTROL SYSTEM
Type: Pamel PC
Modify And Change Any Desired Control
Full Comtrol The Coater To Meeet And Perform The Ultimate Desired End Products
Technical lnformation ls Available

? VACUUM GAUGE SYSTEM
High Vacuum Sensor:2
Low Vacuum Sensor:1		 OPTIONAL
? THIN FILM DEPOSITION CONTROLLER SYSTEM
Deposition Control:ic-5 [Inficon]
Mdc360[Maxtek] Etc.
Quartz Crystal Sensor:1,2,6 Head[s]

? OPTIONAL MONITOP & CONTROLLER LON BEAM SOURCE
Grid Less Type:DC
Girded Type:DC,RF

? ELECTRON BEAM SOURCE
Capacity:15cc,25cc,4Occ Etc
Deflection Angle:180° Or 270°
Crucible Pocket:4,6,8 Etc.

? POLY COLD
Defrost Chamber[Only]
Diffusion Pump [Only]

? WATER COOLING SYSTEM
Water Or Air Cooling Chiller